Posted by Sarup Chopra on May 13, 2008 at 16:40:52:
In Reply to: Chemical etching of TiO2 films posted by Yasir on May 12, 2008 at 05:49:37:
Try Kroll's, a popular etchant for Titanium alloys. Since it contains some hydrofluoric acid, it might also attack Silicon to some degree. Now, in case you just want to to measure the film thickness by means of an SEM, you do not need to etch at all since the atomic numbers of Silicon (14) and Titanium (81) are "miles" apart. Yo can acquire a nice atomic number contrast image by using a backscatter electron detector.