Chemical etching of TiO2 films

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Posted by Yasir on May 12, 2008 at 05:49:37:

I want to see the cross section of TiO2 films on Si substrate. After fine polishing I want to etch the TiO2 film to see its microstructure in SEM.

Can you tell me the suitable etchant for TiO2 plz?

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