Posted by TVP on January 08, 2010 at 08:52:24:
In Reply to: Etching tantalum posted by Philip on December 29, 2009 at 10:21:57:
It is unlikely that your mixture will be sufficient for etching tantalum. Most etchants for Ta do not contain any H2O, just mixtures of various acids. One exception is the alkaline etch consisting of 10 g NaOH + 100 mL H2O (swab or immerse fo 5-15 s). A typical acidic etch for Ta consists of the following:
20 mL HF + 20 mL HNO3 + 60 mL lactic acid
swab for 5-20 s